It consists of three single machines, and can operate three chemicals separately, suitable for TEOS, TEPO, TEB, OMCTS, 4MS, TDMAT, TICL4, HCDS, TCS, DCE and other general and special chemicals.
● MODEL：TCSS-200H
● Gas Supply method : Each Bulk &Process (总3组)
● Control System: PLC
● Device dimensions：1300(W)*700(D)*2100(H）